✦ LIBER ✦
An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation
✍ Scribed by Zhangyang Tang; Shangchun Fan; Weiwei Xing; Zhanshe Guo; Zhengyuan Zhang
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 619 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
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