✦ LIBER ✦
An electron beam lithography tool with a Schottky emitter for wide range applications
✍ Scribed by B.H. Koek; T. Chisholm; A.J. v. Run; J. Romijn; J.P. Davey
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 407 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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