An electric-discharge excimer radiation source on a set of Cl2*(258 nm) and ArCl (175 nm) bands

✍ Scribed by A. K. Shuaibov; A. I. Dashchenko

• Book ID: 110669388
• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 222 KB
• Volume: 43
• Category: Article
• ISSN: 0020-4412
• DOI: 10.1007/bf02759039