✦ LIBER ✦
An efficient wet-cleaning of SiGe virtual substrates and of thick, pure Ge layers on Si(0 0 1) after a chemical mechanical planarization step
✍ Scribed by A. Abbadie; J.M. Hartmann; C. Di Nardo; T. Billon; Y. Campidelli; P. Besson
- Book ID
- 108207647
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 313 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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