✦ LIBER ✦
An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices
✍ Scribed by Koch, Christoph T.; Ozdol, V. Burak; van Aken, Peter A.
- Book ID
- 111693915
- Publisher
- American Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 671 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0003-6951
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