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An efficient parallel iteration method for multiscale analysis of chemical vapor deposition processes

✍ Scribed by Cheimarios, N.; Kokkoris, G.; Boudouvis, A.G.

Book ID
120554138
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
321 KB
Volume
67
Category
Article
ISSN
0168-9274

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## Abstract The article presents an efficient method for characterization of substrate integrated waveguide structures. Substrate integrated circuits are considered as an ensemble of conducting vias placed in a parallel‐plate waveguide. The analysis is based on the wave concept formulation and the