This paper deals with a slender micropin, which can be used for micromachining. The shaping mechanism in electrochemical etching is investigated on the basis of electrochemical kinetics. The pin profile can be controlled by adjusting the current and voltage level. A mathematical model is derived for
✦ LIBER ✦
An effective fabrication method for ultra thin aluminum structures
✍ Scribed by N.J. de Jager; W.J. Perold; U. Büttner
- Book ID
- 113937226
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 587 KB
- Volume
- 520
- Category
- Article
- ISSN
- 0040-6090
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