✦ LIBER ✦
An axisymmetric model for an RF plasma in contact with a surface having a nonuniform secondary electron emission coefficient
✍ Scribed by Weilu Xu; Sides, P.J.
- Book ID
- 117862812
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 679 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0093-3813
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