✦ LIBER ✦
An axial-emission ultrahigh vacuum pump: J Z Chen and C D Suen,J Vac Sci Technol, 20 (1),1982,88–91
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 172 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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