✦ LIBER ✦
An attempt to understand the sputtering yield enhancement due to implantation of inert gases in amorphous solids
✍ Scribed by K. Wittmaack
- Book ID
- 113276417
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 471 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0168-583X
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