✦ LIBER ✦
An attempt to specify thermal history in CZ silicon wafers and possibilities for its modification
✍ Scribed by G. Kissinger; A. Sattler; T. Müller; W. von Ammon
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 151 KB
- Volume
- 401-402
- Category
- Article
- ISSN
- 0921-4526
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