An array-type PSD (position-sensitive detector) for light pattern measurement

✍ Scribed by A. Kawasaki; M. Goto; H. Yashiro; H. Ozaki

• Book ID: 103957237
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 644 KB
• Volume: 22
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(89)80030-5

✦ Synopsis

Design and performance charactenstlcs of an array-type posltlon-sensltlve detector (PSD) based on the lateral photoeffect are described The array-type PSD contams 16 one-dimenslonai ( 1-D) PSD stnps next to each other, and 1s deslgned for the measurements of the mcldent hght pattern The mf?uence of design parameters for I-D PSD stnps of an array-type PSD (such as length and gap) on pattern measurement charactenstlcs were investigated