✦ LIBER ✦
An approach to improve initial pump-down speed of turbomolecular pumps by water-repellent coating on the blades
✍ Scribed by M Iguchi; T Sawada; M Okamoto
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 414 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0042-207X
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