An approach to gas flow measurement by laser induced fluorescence. Application to chemical vapor deposition

✍ Scribed by Noriaki Asada; Hiroyuki Matsui; Sadao Nakajima

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 468 KB
• Volume: 82
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/0030-4018(91)90457-o