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An Application of 3-D MEMS Packaging: Out-of-Plane Quadrupole Mass Filters

✍ Scribed by Velasquez-Garcia, Luis F.; Cheung, Kerry; Akinwande, Akintunde I.


Book ID
120187988
Publisher
IEEE
Year
2008
Tongue
English
Weight
555 KB
Volume
17
Category
Article
ISSN
1057-7157

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