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An apparatus for RF plasma zone melting

โœ Scribed by Y. Kumashiro; A. Itoh; E. Sakuma; S. Misawa


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
204 KB
Volume
52
Category
Article
ISSN
0022-0248

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In this paper, we report on numerical solutions and model reduction results for a plasma glow discharge model with a radio frequency ionization source. A pseudospectral implementation of a global spectral method was found to give accurate simulation results that correctly reflected the expected phys