An angstrom-positioning system using a twist-roller friction drive

✍ Scribed by Hiroshi Mizumoto; Makoto Yabuya; Tatsuhito Shimizu; Yoshihiro Kami

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 491 KB
• Volume: 17
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)00010-w