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An analytical model of the material removal rate between elastic and elastic-plastic deformation for a polishing process

✍ Scribed by Tsann-Rong Lin

Publisher: Springer
Year: 2006
Tongue: English
Weight: 169 KB
Volume: 32
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-005-0391-4

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