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An analytical model and verification for MEMS Pirani gauges

✍ Scribed by Santagata, F; Iervolino, E; Mele, L; van Herwaarden, A W; Creemer, J F; Sarro, P M

Book ID: 111678673
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 437 KB
Volume: 21
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/21/11/115007

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