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An analytical formula and FEM simulations for the viscous damping of a periodic perforated MEMS microstructure outside the lubrication approximation

✍ Scribed by Dorel Homentcovschi; Bruce T. Murray; Ronald N. Miles


Book ID
106330810
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
699 KB
Volume
9
Category
Article
ISSN
1613-4982

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