✦ LIBER ✦
An Analytic Gradient-Based Inverse Lithography Approach for Partially-Coherent Double-Exposure Lithography
✍ Scribed by Xiong, Wei; Zhang, Jinyu; Tsai, Min-Chun; Wang, Yan; Yu, Zhiping
- Book ID
- 111904037
- Publisher
- American Scientific Publishers
- Year
- 2010
- Tongue
- English
- Weight
- 786 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1546-1955
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