✦ LIBER ✦
An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
✍ Scribed by Michael T. Seman; David N. Richards; Pieter Rowlette; Colin A. Wolden
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 470 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0948-1907
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