✦ LIBER ✦
An analysis of LPCVD system parameters for polysilicon, silicon nitride and silicon dioxide deposition : William A. Brown and Theodore I. Kamins. Solid St. Technol. p. 51 (July 1979)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 134 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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