✦ LIBER ✦
An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive
✍ Scribed by Liao, Yunn-Shiuan; Chyuan, Shiang-Woei; Chen, Jeng-Tzong
- Book ID
- 121228561
- Publisher
- Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 705 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0960-1317
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