✦ LIBER ✦
An algorithm for automatic prober movement control for better coverage of test sites on a wafer during measurement
✍ Scribed by Shobha Gupta; Mahesh Kumar; S. Ahmad
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 135 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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