An AlGaAs laser with high-quality dry etched mirrors fabricated using an ultrahigh vacuum in situ dry etching and deposition processing system

✍ Scribed by Uchida, M.; Ishikawa, S.; Takado, N.; Asakawa, K.

• Book ID: 117869676
• Publisher: IEEE
• Year: 1988
• Tongue: English
• Weight: 886 KB
• Volume: 24
• Category: Article
• ISSN: 0018-9197
• DOI: 10.1109/3.8560