An air-flow based wafer bake system for improved temperature uniformity

✍ Scribed by Lan Wang; Ai Poh Loh; Zhi Ming Gong; Siew Loong Chow

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 452 KB
• Volume: 18
• Category: Article
• ISSN: 0959-1524
• DOI: 10.1016/j.jprocont.2008.04.021