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An advanced method for measuring the residual stress of deposited film utilizing laser spallation technique

✍ Scribed by R. Ikeda; T. Uchiyama; H. Cho; T. Ogawa; M. Takemoto


Book ID
108275760
Publisher
Institute of Physics and National Institute of Materials Science
Year
2006
Tongue
English
Weight
387 KB
Volume
7
Category
Article
ISSN
1468-6996

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