An advanced apparatus for ion beam assisted sputter coating of the inner walls of tubes

✍ Scribed by T Kraus; R Kern; B Stritzker; W Ensinger

• Book ID: 114170731
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 449 KB
• Volume: 148
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00785-x