An adaptive multi-parameter based dispat
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L.H. Wu; P.Y. Mok; J. Zhang
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Article
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2011
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Elsevier Science
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English
โ 708 KB
The automation of interbay systems in 300 mm semiconductor wafer fabrication systems (SWFSs) is complex due to the dynamic, stochastic and mass transportation demands, transportation deadlocks, and vehicle blockages. An adaptive multi-parameter based (AMP) dispatching policy is proposed to obtain be