An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions

✍ Scribed by M.P. Seah

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 233 KB
• Volume: 229
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.12.129