✦ LIBER ✦
An 18O study of oxygen exchange phenomena during microwave-discharge plasma oxidation of silicon: Shin-ichiro Kimura et al, J appl Phys, 63, 1988, 4655–4660
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 147 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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