Ampoule failure sensor development for semiconductor crystal growth experiments

✍ Scribed by Dale A. Watring; Martin Johnson

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 342 KB
• Volume: 140
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90493-6