𝔖 Bobbio Scriptorium
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Amorphous solid systems: diamond-like carbon, carbides, films and multilayer structures

✍ Scribed by V.F. Dorfman; B.N. Pypkin

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
666 KB
Volume
48
Category
Article
ISSN
0257-8972

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Hardness of and stress in tungsten carbide-diamond like carbon (WC-DLC) multilayer coatings sputtered in reactive argon/acetylene plasma have been studied as a function of the bilayer thickness. The multilayer structure has been deposited by a periodic modulation of the reactive acetylene gas flow f