Amorphous-crystal boundary motion and impurity redistribution during keV Ne+ ion irradiation of Si

✍ Scribed by Sukirno; B. Zeroual; G. Carter; G.A. Stephens

• Book ID: 113283176
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 414 KB
• Volume: 67
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95854-k