✦ LIBER ✦
Amorphous clusters associated with recoil oxygen created in As+ ion-implanted Si/SiO2 systems
✍ Scribed by T. Izumi; T. Matsumori; T. Hirao; Y. Yaegashi; G. Huse; K. Inoue
- Book ID
- 103306706
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 600 KB
- Volume
- 182-183
- Category
- Article
- ISSN
- 0029-554X
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