Amorphous Boron containing silicon carbo-nitrides created by ion sputtering

✍ Scribed by V.M. Vishnyakov; A.P. Ehiasarian; V.V. Vishnyakov; P. Hovsepian; J.S. Colligon

• Book ID: 113919529
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 684 KB
• Volume: 206
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.07.002