Amorphous aluminum silicate films by metal-organic chemical vapor deposition using aluminum-tri-sec-butoxide and tetraethyl orthosilicate

✍ Scribed by Dong-Hau Kuo; Bo-Yu Cheung; Ren-Jye Wu

• Book ID: 117146105
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 524 KB
• Volume: 324
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(02)01597-1