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Amorphisation during elevated temperature implantation

✍ Scribed by G Carter; MJ Nobes; RG Elliman

Book ID: 103468275
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 987 KB
Volume: 45
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(94)90081-7

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