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[American Institute of Aeronautics and Astronautics 9th AIAA/ASME Joint Thermophysics and Heat Transfer Conference - San Francisco, California ()] 9th AIAA/ASME Joint Thermophysics and Heat Transfer Conference - Modeling of Heat and Mass Transfer in a Cold Wall CVD Reactor for Large Area Poly-SiC Film Deposition

โœ Scribed by Wang, Rong; Ma, Ronghui


Book ID
121062500
Publisher
American Institute of Aeronautics and Astronautics
Year
2006
Weight
714 KB
Category
Article
ISBN
1624100449

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