✦ LIBER ✦
Aluminum thinning onto blanket and etched back tungsten plugs: Simulation of geometrical effects
✍ Scribed by M.S. Marangon; G. De Santi; A. Marmiroli; R. Pasinetti
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 201 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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