𝔖 Bobbio Scriptorium
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Aluminum nitride buffer layer for diamond film growth

✍ Scribed by Godbole, V. P.; Narayan, J.


Book ID
127154268
Publisher
Cambridge University Press
Year
1996
Tongue
English
Weight
622 KB
Volume
11
Category
Article
ISSN
0884-2914

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We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the