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Alumina MEMS platform for impulse semiconductor and IR optic gas sensors

✍ Scribed by A.A. Vasiliev; R.G. Pavelko; S. Yu. Gogish-Klushin; D. Yu. Kharitonov; O.S. Gogish-Klushina; A.V. Sokolov; A.V. Pisliakov; N.N. Samotaev

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