Alternative dielectrics to silicon dioxide for memory and logic devices

✍ Scribed by Kingon, Angus I.; Maria, Jon-Paul; Streiffer, S. K.

• Book ID: 109770663
• Publisher: Nature Publishing Group
• Year: 2000
• Tongue: English
• Weight: 232 KB
• Volume: 406
• Category: Article
• ISSN: 0028-0836
• DOI: 10.1038/35023243