AlSm and AlDy alloy thin films with low resistivity and high thermal stability for microelectronic conductor lines

✍ Scribed by Shinji Takayama; Naganori Tsutsui

• Book ID: 108388920
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 490 KB
• Volume: 289
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(96)08882-7