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AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

✍ Scribed by A. Choujaa; N. Tirole; C. Bonjour; G. Martin; D. Hauden; P. Blind; A. Cachard; C. Pommier


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
290 KB
Volume
46
Category
Article
ISSN
0924-4247

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