AlN/GaN Metal Insulator Semiconductor Field Effect Transistor Using Wet Chemical Etching with Hot Phosphoric Acid

✍ Scribed by Ide, T. ;Shimizu, M. ;Suzuki, A. ;Shen, X.-Q. ;Okumura, H. ;Nemoto, T.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 85 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200111)188:1<351::aid-pssa351>3.0.co;2-x