✦ LIBER ✦
AlN/AlGaN short-period superlattice sacrificial layers in laser lift-off for vertical-type AlGaN-based deep ultraviolet light emitting diodes
✍ Scribed by Takeuchi, Misaichi; Maegawa, Tomohiro; Shimizu, Hiroshi; Ooishi, Shin; Ohtsuka, Takumi; Aoyagi, Yoshinobu
- Book ID
- 121324285
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 395 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0003-6951
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