✦ LIBER ✦
AlN/3C–SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
✍ Scribed by Chih-Ming Lin; Yung-Yu Chen; Valery V. Felmetsger; Debbie G. Senesky; Albert P. Pisano
- Book ID
- 111992358
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 555 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0935-9648
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