All-metal vacuum deposition apparatus: Varian deposition equipment,Brit patent 1,065,564, Patent abstr, 7 (19) part 6B, 12th May 1967, 6

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 157 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)91908-2